If ASML (and all their knowledge) disappeared off the face of the earth today progress in semiconductors would probably be set back a decade or two.
The fact they are a single company in one country that the global industry depends on for progress in semis should be of concern.
With EUV the challenge is the crazy difficulty of generating the required light source at the right intensity and focusing it. At that wavelength things behave differently, to say the least.
You can do a lot with 6502s, which are still being made. (And we can probably make better than that. 80486s?)
Most relevant as far as I can tell this situation was intentionally created that way to be able to better keep China off the high end chip market.
Intel FLIR DeBeers Westinghouse for nuclear stuff Lots of specialty suppliers for aerospace where there is only one or two companies that do a particular thing.
Its actually super common.