I would like to know the details of how they move big 300 mm wafers in and out of vacuum 160 times per minute and avoid vibrations, The vibration that moves the wafer or any mirrors just a few atom diameters would screw up the result. They have magnets that levitate many parts but it's still amazing.

Also they made it fit into a plane and survive long distance flight vibrations !

See Asianometry video on this: https://www.youtube.com/watch?v=1fOA85xtYxs

very carefully.

160 wafers per hour, not minute.

Still impressive

Is that entire thing machined out of one block of metal? 0:49 timestamp

Yes. https://wp.technologyreview.com/wp-content/uploads/2021/10/N...

I'm curious, any specific reason ? Screws not allowed ?

Would appreciate your insights

Rigidity and registration of the various pieces w respect to each other? (There seems to be lots of bolting sites on that block.) Also really there are very large and most likely heavy parts of the machine that rest on this thing and require a similarly sturdy base.

Surprising how it looks a bit like a huge ship diesel crank case. Even if it's kind of the opposite technologically.

Looks like a huge chunk of aluminium.

The most shocking thing to me was the Bridge Crane in the clean room. That's got to be one hell of a complex production process to get that right.

When you can spend a multibillion dollar budget, per room, a lot of things become easier to get right.

It looks like that (very clean and encased) bridge crane lives above the normal clean room ceiling? Makes sense. What tickled me most was the high polish stainless steel "hooks" hanging from the crane (but with some lifting parts painted). Hanging on white (polymer?) ropes. Nice.

Video doesn't work for me on the OP's page. I found this one: https://www.youtube.com/watch?v=3PCtf1ONYMU

WOW

At least according to the article this is the first High-NA machine shipped.