ASML people like to describe it as "a bit like having robot controlled helicopters tie a rope around a skyscraper in a heavy storm, while not crashing nor pulling the skyscraper over" iirc.
This is because at nanoscale, every vibration is a huge movement, and even the flattest surface is mountainous. An ASML machine is basically little more than tons of little sensors and control mechanisms to detect all these vibrations and surface shapes and to adjust the light beam positioning accordingly.
Because of this, nearly the entire company (several thousand people R&D staff) is focused on "putting the pieces together". Eg they do comparatively little deep research. It's all engineering.
So even if the 'only' problem is putting the pieces together, that doesn't mean it is even possible. Look at it another way-- same thing can be said about Nuclear Fusion :D
I suppose that Apple or Google would be able to pull it off though.
I suppose that much of the tech is already in the scientific literature, and the "only" problem left is putting the pieces together.