"Intel stated in 2015 that the pace of advancement has slowed, starting at the 22 nm feature width around 2012, and continuing at 14 nm.[20] Brian Krzanich, CEO of Intel, announced, 'Our cadence today is closer to two and a half years than two.'"
https://en.wikipedia.org/wiki/Moore%27s_law
"Intel disclosed in a regulatory filing that it is slowing the pace with which it launches new chip-making technology."
https://www.technologyreview.com/s/601102/intel-puts-the-bra...
Moore's law for GPUs, on the other hand, hasn't slowed down yet because it's not as close to the wall.
https://blog.openai.com/ai-and-compute/
https://www.pcgamer.com/nvidia-ceo-says-moores-law-is-dead-a...
Moore's law doesn't include capital investment as a factor.
Initially, it could be mostly ignored as it was swamped by available profits (at least for microprocessors, less so for memory). More recently, I believe it's been matched by increased volume of semiconductors used throughout the global economy.
But at some point we'll reach saturation. And costs to shrink feature size will continue to increase exponentially. So it simply won't make financial sense to continue.
(Unless non-silicon, non-electrical, or radical patterning technology hits a breakthrough)
Presumably they were too expensive (manufacturing, power, cooling, etc.) since they're not ubiquitous. IIRC the "barrier" to going any higher was the speed of light across the chip: running faster than 5GHz would require the output to be causally independent from the input!