Many for last gen process nodes, and from a second or third hand supplier if you could even find one. ASML makes very few fully working machines each year, and the cost and throughput those machines have is astronomical.

They have spare parts you'd bet, and I'd bet they have some SLA agreement with each customer where an engineer is basically on call nearby in case a single thing dosnt work or a random part breaks or needs servicing.

Asianometry did a great video on the cost of downtime when it comes to ASML device in any fab. While I am not directly in this field and can't speak to the accuracy of the numbers john gives, he does not seem one to just make stuff up as his quality of video production for niche topics is quite good.

Almost a decade ago KFAB had a fire, power was cut, everything in process was dumped, they planned to restart but ended up being was cheaper to close the whole facility .

Probably for the best though, KFAB had been discharging several tons of solvents, cleaning agents, and reagents per year into the surrounding area [for as long as it ran](https://enviro.epa.gov/facts/tri/ef-facilities/#/Release/640...)

https://enviro.epa.gov/facts/tri/ef-facilities/#/Release/640...

try 400 mil

Put a 1 or 2 in front of that