The tolerances required are simply crazy.
My favorite example is during Covid where reduced boron quantities resulted in less Pyrex glass that makes test tubes meaning transporting vaccines was at points rate limited.
I’ve read similar points in the components for lasers to ASML but can’t remember specifics. Chip shortage is the funny one, ASML require more chips that limit their turnaround times which in itself limits chips.
Ah yes. No development time involved here at all. They just built it. I don't know what ASML, TRUMPF, Zeiss, and occasionally the Fraunhofer Institute were mucking about for 25 years. Completely boring bespoke build. Bah. Could get it from anyone else by next week. Pick an off-the-shelf coating too and be done.
It's a wonder nobody else is taking a slice of those ~4 billion USD of revenue Zeiss is making off a bunch mirrors for lithography machines each year.