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A comment on TSMC unveils 1.6nm process technology with backside power delivery. Parent comment

Re:TSMC unveils 1.6nm process technology with backside power... by pjc50 on Friday April 26, 2024 @06:29AM (#40167671)
Well, "extreme UV" these days. 13.5nm, larger than the "feature size". And even that required heroic effort in development of light sources and optics.
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