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Re:ASML EUV Lithography Machine Could Keep Moore’s Law on Track by arethuza on Sunday July 30, 2023 @06:32AM (#36929753)
There are some fascinating videos on YouTube from Zeiss, who do the optical systems for the ASML machines:

https://www.youtube.com/watch?v=z6c3vzIGo9o&t=632s

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