15 years ago, when I was there, Zeiss SMT also did the light sources (discussed elsewhere in the thread), btw, not just supplying the lenses. Don't know if that's still the case. I don't know exactly what the lens/mirror systems for EUV look like, but the "old" 193nm ones were something to behold.
https://en.m.wikipedia.org/wiki/Carl_Zeiss_SMT
15 years ago, when I was there, Zeiss SMT also did the light sources (discussed elsewhere in the thread), btw, not just supplying the lenses. Don't know if that's still the case. I don't know exactly what the lens/mirror systems for EUV look like, but the "old" 193nm ones were something to behold.