What has, hopefully, changed is we aren't allowing companies to store it in leaking underground tanks, etc. All these superfund sites aren't a result if business as usual, in each case there is some major, systemic, intentional oversight and frankly corruption.

Source - I've worked some in that industry designing automation for asml, applied, etc.

Not in the semiconductor industry but a good example of the kind of thing that results in a super fund site is Rocky Flats in Colorado. There is a now famous news broadcast where the representative from the department of energy is saying "there is no fire" and a big fire can be clearly seen behind them.

They were machining plutonium and uranium nuclear bomb triggers on lathes in special glove boxes with particle capture and ventilation systems that were supposed to scrub the air before venting it to atmosphere. These systems weren't properly maintained and they got clogged up with radioactive dust and caught fire. It was later found that they were dumping radioactive dust into the air, and had hundreds of barrels of radioactive waste in steel barrels that were rusted through leaking into the ground for decades. It's the only time one federal agency (the FBI) raided a facility of another federal agency (DOE).