The US has a dedicated submunition for this mission called the BLU-114/B. It has been highly effective in past uses, though I imagine cleanup after the conclusion of hostilities was a serious pain. There's been research into even smaller conductors that would get inside fan-cooled equipment, though a.) one might imagine potentially negative health impacts on persons exposed to these materials, and b.) it might be difficult to occupy an area previously hit with these types of munitions given the proliferation of fan-cooled equipment in the military.

https://commons.wikimedia.org/wiki/Category:Graphite_bombs#/...