ASML has engineers who go out and spend months or a year or more, just taking various measurements of the location inside the building at the site where the machine will be operating. Then those engineers go back to Eindhoven to oversee the building of that machine from the ground up, and run through proving cycles. Then the whole thing has to be taken apart and shipped and then rebuilt at the site. And then there are months afterwards as the team does further work and testing before they can finally use that machine for production purposes.
The Saturn V rocket was much easier to build and move. Nothing the rocket industry has can compare to the difficulty of building and moving these machines.
Disclaimer: I worked as a consultant at ASML for several months, helping them to rebuild their Unix infrastructure systems that they used to support the engineers who did all that design and build work.
It's also 3 years away from opening in AZ (2024). Then they have to fine tune the equipment and processes over x runs. New plants tend to have low yields until those processes are smoothed out and perfected. You don't just set up a plant and start churning out chips with 98% success rate at 5nm once the factory is built. It probably takes 5-6 years from construction start to churning out quality chips in numbers that are actually profitable.