A class 10000 clean bench might be more practical. A lot easier to keep your cleanroom clean when the humans are outside of it, just sticking gloved arms in from time to time.

Be careful about purifying alcohol. Some backward countries have religiously-based legal prohibitions on this. My own backward country tightly controls acetone as a "precursor" to "stupefacients".

Nice thing about silane is that you don't have to worry about accidentally breathing it. There's a cheap and simple process for manufacturing it on demand from magnesium silicide, so you don't have to store it either.