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Re:Japanese companies fight for share of EUV chip technology... by calaphos on Sunday January 24, 2021 @06:47PM (#25897427)
Cymer seems to only do DUV light sources, the EUV stuff is developed by Trumpf and Zeis in Germany.
Re:Japanese companies fight for share of EUV chip technology... by trynumber9 on Sunday January 24, 2021 @06:51PM (#25897454)
"ASML San Diego is responsible for the R&D and manufacturing of EUV light sources for lithography systems. Cymer focuses on DUV light sources." From ASML's website.

ASML San Diego was part of their joint research before acquisition.