Perhaps by something as simple as by a clever pattern of temp sensor reads causing your code to think temperature is in safe range for your application?
Or causing your code to execute extra multiplies to generate heat to hide a momentary temperature drop.
My point is even if you could 100% trust your supply chain and 100% validate your silicon matches your design, there are still residual issues.
For example, power supply glitch attacks [0] are nowadays well known, including techniques to make them sufficiently reliable.
Fair enough.
Has there to your knowledge ever been documented evidence that a mask had in fact been tampered with in a way that caused a system to be compromised?
I don't have any reference of a mask being modified to give to you, but it is so easy to do it that we don't actually need evidences to be worried.
If you think about it, just by changing implantation parameters on the transistors that form a ring oscillator for generating random numbers can bias it (this does not require not even modifying the mask).
RNGs are a weak spot. Thank you for that example.