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Re:Tin Plasma Extreme Ultraviolet Radiation Makes 5nm Integr... by blp on Wednesday September 04, 2019 @08:37AM (#20876555)
I can split any small pitch exposure into separate, larger pitch exposures. For instance, if I need 40nm pitch, and my system is limited to 80nm, I can do 4 exposures. The next shrink requires 8.

To figure this out, draw a square, and each node is an exposure.

This process works forever in theory, but is limited in practice by the mutual registration of the exposures.

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