Re:Tin Plasma Extreme Ultraviolet Radiation Makes 5nm Integr...
by blp on Wednesday September 04, 2019 @08:37AM
(#20876555)
I can split any small pitch exposure into separate, larger pitch exposures. For instance, if I need 40nm pitch, and my system is limited to 80nm, I can do 4 exposures. The next shrink requires 8.
To figure this out, draw a square, and each node is an exposure.
This process works forever in theory, but is limited in practice by the mutual registration of the exposures.
To figure this out, draw a square, and each node is an exposure.
This process works forever in theory, but is limited in practice by the mutual registration of the exposures.