You're essentially taking people with breathing difficulties and increasing their exposure to a substance that is known at low levels to cause breathing problems. Additionally CPAP's filter systems have no way of removing O3 from the room's air.
When properly used the device is harmful.
Not that medical devices aren't themselves the Wild West. Hip replacements? We used those without testing for decades. CPAP? Technically only available by prescription, but go on eBay and you can order what you like.
Our regulatory authorities in the U.S. are a real mess. And while I believe we can trust Americans not to poop where they sleep (i.e. knowingly sell lead contaminated products to their neighbors), it makes no difference if our addiction to cheap Asian imports means we get products from people who don't feel much distress if someone in a faraway country gets sick (and can't be arrested for making them sick, either, since there functionally no truly international law enforcement).
The amount of ozone you're going to be exposed to after the device is done (it only runs a cycle when you pack your mask into it) is minuscule and likely less harmful than the nasties that would grow in your machine, mask, and tubing (warm, dark places).