Re:Intel: EUV-Enabled 7nm Process Tech is on Track
by baybal2 on Monday December 10, 2018 @04:11AM
(#18646382)
Yes, but they are not gonna be using EUV for every layer. The only way it makes economical sense is where they replace horrific SAQP layers with a single exposure EUV pass, and use conventional litho for the rest to maximise throughput.
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