Re:EUV Lithography Finally Ready for Chip Manufacturing
by dogma1138 on Monday January 08, 2018 @02:47PM
(#16099653)
I believe it’s mostly single slit and diffraction, light can pass through holes smaller than its wavelength but even that isn’t needed just yet, nanophotonics will be the next step tho.
http://web.eecs.utk.edu/~jaynewu/Teaching/resolution.pdf