I just reviewed Chapter 4 of Ivan Ristić's book and the only incidents that might be considered compromises on this level were DigiNotar and NICCA, which both led to revocation of intermediates. However, the book doesn't explain technically what the exact nature of the compromises was, so I'm not sure either of them involved an actual compromise of the private key material itself.

There were many other incidents involving problems with behavior of PKI participants, and I'm sure reading this chapter will give people a sense that the ability to remove trust from intermediate CAs is an important ability.