University of Illinois at Urbana-Champaign has iVenture Accelerator program. They have plenty have resources and offers financial support ($2500 per fellow and $10k per startup) and co-working space in the UIUC Research Park.

They don't care if its hard-tech or not. Your company has to be good enough to qualify for their program.

https://business.illinois.edu/iventureaccelerator/