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Re:Intel delays chip-making changes by whazor on Thursday July 16, 2015 @03:16PM (#9899320)
I think the current techniques are becoming too complicated and Intel is now fully going to focus on EUV. The new EUV machines are reaching 70% availability on average, according to the producer ASML[1].

[1] http://www.asml.com/asml/show.do?lang=JA&ctx=5869&rid=52080

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