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Re:IBM says it has made working versions of 7nm chips by pjc50 on Thursday July 09, 2015 @05:28AM (#9856923)
It's not xrays, it's "extreme ultraviolet" (EUV), plus diffraction-based multiple patterning. http://www.extremetech.com/computing/160509-seeing-double-ts...

(tldr: 193nm light works down to 28nm lambda; progress requires moving further into UV and/or use immersing in liquid with different refractive index)

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