Be careful that your philosophy does not get caught in the definition of words. I would think an illusion is something that occurs once you are aware, because your awareness is fooled. If the awareness is the illusion, then who's fooled? I wouldn't think you could fool an illusion, but the meaning of words is quite subjective.

If you want to make a point, say something like: "free will is your mind regurgitating sensory information and decisions you took moments before by relating them to current senses and memory creating a feeling of awareness", that takes away some of the thunder, but also part of the ambiguity.