I'm pretty sure ASML, and their supply chain, do have plans to increase production, as do the chip fabs - they all see the demand, while at the same time being leary of boom and bust which is the historical reality of the chip business.

But, the production expansion rate of none of these companies is being limited by lack of trained personnel, and if it were it would surely be faster to hire/train more humans since robots are still very far from human dexterity, not to mention intelligence.

Robots and AI are tools of automation, a way to replace humans with machines, but not all the problems in the world are bottle-necked by lack of humans, or the cost of humans.