I feel like just chucking a big ol' jug of sand or salt water into the machine would probably be enough to pretty much permanently disable it, let alone something flammable.

It's not like TSMC engineers and technicians would be raptured the first moment, leaving the fabs just standing there deserted and intact.

This really seems like an answer someone gave to a clueless politician asking a stupid question. "Yes senator, there's a 'self-destruct' (eye roll)". Just leave out that the self-destruct is one dude with the fire bucket from the smoker's shelter in the car park.