Re:ASML to Ship First High-NA EUV Tool This Year: $300M per ...
by dirtyid on Thursday September 07, 2023 @06:36PM
(#37426577)
>like hundreds of meters
IIRC Tsinghua SSMB ring design has circumference of ~140m for kW EUV light source. My understanding, at least how SSMB was/is being sold is: storage ring technology mature, price per tool / light source will be relative low.
IIRC Tsinghua SSMB ring design has circumference of ~140m for kW EUV light source. My understanding, at least how SSMB was/is being sold is: storage ring technology mature, price per tool / light source will be relative low.
E: tsinghua ssmb update from last year
https://conference-indico.kek.jp/event/160/contributions/287...