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Re:ASML to Ship First High-NA EUV Tool This Year: $300M per ... by trevyn on Thursday September 07, 2023 @12:00PM (#37420968)
That first article has an interesting assertion about sub-7nm, but is not a great source and doesn’t appear to offer any other details or references.

I would be very surprised if they are able to do anything without EUV.

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