It's irrelevant that the usage of a word, by the word's very construction, favors the formation of false beliefs, so long as there are good intentions behind it?
The fact that a word can be used in the context of slavery doesn't mean the word always and everywhere carries the taint of slavery. What could possibly limit the reach of such a principle? Can I talk about how I like cotton shirts better than other fabrics, when the mere mention of cotton might bring some people back to an uncomfortable place?
But IIRC, the first time I encountered the word "master" in computing, it was in the context of serial link data transfer, and there was a "slave".