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A comment on ASML EUV Lithography Machine Could Keep Moore’s Law on Track. Parent comment

Re:ASML EUV Lithography Machine Could Keep Moore’s Law on Track by fnordpiglet on Saturday July 29, 2023 @11:37PM (#36927581)
I’d note that quote is 14 years old - hopefully there’s been some R&D over that time!
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Re:ASML EUV Lithography Machine Could Keep Moore’s Law on Track by throwawaylinux on Sunday July 30, 2023 @12:41AM (#36927865)
Still, ASML's latest EUV machine, the 3600D, does draw 1.3 megawatts.

https://www.sec.gov/Archives/edgar/data/937966/0000937966220...

But when it comes to cost, evidently replacing many passes and other complicated processes with DUV machines with fewer EUV passes is a net win. And the energy required to create these chips must be a small fraction of the energy they will use in their lifetimes, so improved efficiency of the smaller nodes enabled by EUV would surely be a win, all else being equal.

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