It wouldn't take any. Military action against Taiwan would lead to sanctions at a level never seen before. Without Western support in the form of raw materials, spare parts, and intellectual property, the hardware at TSMC is fit for nothing but whatever the modern equivalent of Weird Stuff Warehouse is.

I guess they could raise a few yuan by selling the DUV and EUV machines on eBay. "Removed from a working environment." That'd be about all they could do with it.