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Re:How to make a CPU – a simple picture-based explanation by kayson on Wednesday November 10, 2021 @04:34PM (#29181196)
I think the Baker book is good for an overview. I also used Pierret's Semiconductor Device Fundamentals in undergrad. It goes more in depth for device physics than it is a pure manufacturing text, but I recall it also had a nice overview.
Re:How to make a CPU – a simple picture-based explanation by zsmi on Wednesday November 10, 2021 @07:53PM (#29183106)
Baker http://cmosedu.com

And Weste http://pages.hmc.edu/harris/cmosvlsi/4e/index.html

are both very good. Weste is used in more Universities but it also has a digital slant to it.