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Re:Intel breaks ground on $20B Arizona plants as U.S. chip f... by sanxiyn on Tuesday September 28, 2021 @01:18PM (#28685138)
Re use of water in lithography: it became necessary at 90 nm level (~2004), so it is not exactly new. Water is used to bend light. (Isn't it amazing?)

https://en.wikipedia.org/wiki/Immersion_lithography

While this use requires extreme purity, it is not a big use in terms of volume.

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