Here's an open source stage project using flexures that will likely help
https://openflexure.org/projects/blockstage/
Also, see Dan Gelbart's 18 video series about building prototypes
But it's a great assembly for anything that doesn't have a feedback on the positioning.
I've got to try this on my next attempt.
In the future, if you'd like even more precise measurements, theoretically you could use 2 different frequencies or a reflected source, and look at the interference or superposition of the waves.
I'm by no means an expert in this, but I've heard that optical measurement (eg: laser + Michelson interferometer) could theoretically take you down to the nanometer range.
But it's easy to go overboard with this, haha.
https://www.osapublishing.org/oe/fulltext.cfm?uri=oe-20-5-56...
https://iopscience.iop.org/article/10.1088/0957-0233/9/7/004
Perhaps you could somehow attach the piezoelectric component or bars to a micrometer [1] which is designed for accurate and repeatable measurement?
Yet, they are a bit expensive. I'm still not willing to budget all that, but I'm starting to consider it.
[1] https://www.aliexpress.com/wholesale?catId=0&initiative_id=S...
Looks like the exact thing I need are micrometer heads, and some even come with nice threaded mounts.
https://www.global-optosigma.com/en_jp/Catalogs/pno/?from=pa...
If you have machining/fabrication skills, it might also be possible to buy a few worm gear sets and modify your micrometer to move really slowly but precisely.
My problem is that it doesn't matter how I design the thing, either the screws offer too little precision so I can't help but to crush the tip into the sample every time, or too little travel distance so I can't help but crush the tip into the sample when adjusting the coarser screws near the tip. This is the kind of thing that looks like a non-problem on the web, because everybody just ignores this step.