That article does not say that the first 15 went to Intel. It says that Intel placed an order for 15 in 2015. But by the end of 2017, ASML's cumulative shipments of EUV machines was only 16, and I'm pretty sure TSMC had at least two of those. As of a year ago, TSMC had half of all the EUV machines that have been shipped, and more than half of the EUV production capacity (on account of newer EUV machines having higher throughput).