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Re:Second IC by eurasiantiger on Saturday August 14, 2021 @05:11AM (#28179258)
It’s not really feasible to separate noble gases out of the atmosphere in a building HVAC system.
Re:Second IC by gravypod on Saturday August 14, 2021 @06:51AM (#28179673)
Couldn't you just use positive pressure of O2 and nitrogen? Push all other gasses out? Would cost a lot but it is doable.
Re:Second IC by baybal2 on Saturday August 14, 2021 @06:58AM (#28179698)
More recent tools do work that way. The whole "tool line" is flushed with process atmosphere.