That's right. Deep UV. They all but threw in the towel on EUV.

But the difference is that ASML + Carl Zeiss absolutely run the market.

Nikon has about 10% market share, and Canon 5%. The rest is basically ASML.

The thought on my mind is that any one of the major American semiconductor equipment manufacturers could partner with either of the two Japanese optics houses. Canon is worth about US $25B, and its semiconductor business generates about a fifth of its revenue. It's big enough to be useful, but small enough to be acquirable.