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Re:5nm in the USA: TSMC's Board Approves $3.5B Fab in Arizona by fpoling on Wednesday January 27, 2021 @03:13AM (#25925581)
Few years ago EUV was not considered production ready. Intel made a reasonable bet that given their lead in the traditional lithograph by continuing with it they would stay ahead of competition until EUV matures.

TMSC instead decided to try EUV. That was a risky bet. But then ASML from The Netherlands managed to solve the problem of EUV intensity and Intel had found that they just could not manage to push traditional lithography further.

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