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Re:Intel Reinvents Transistors Using New 3-D Structure by ravimc on Wednesday May 04, 2011 @04:30PM (#2515185)
TSMC has plans to develop similar(not same) non-planar fab at 12nm, I think, by 2012. They call their's FINFET and showed a prototype in 2002.

http://en.wikipedia.org/wiki/Multigate_device#FinFETs

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