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A comment on ‘Better Yield on 5nm Than 7nm’: TSMC Update on Defect Rates for N5. Parent comment

Re:‘Better Yield on 5nm Than 7nm’: TSMC Update on Defect Rat... by welterde on Tuesday August 25, 2020 @11:05AM (#24272074)
What kind of equipment are we talking here?

First thing that comes to mind are lithography machines, but for the very high-end ASML is the only game in town currently afaik. And they are sitting in the Netherlands (working with Zeiss in Germany). For larger feature sizes there are vendors too.

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Re:‘Better Yield on 5nm Than 7nm’: TSMC Update on Defect Rat... by baybal2 on Tuesday August 25, 2020 @11:27AM (#24272320)
Equipment, some low profile stuff like coaters, wafer preparation, and cleaning. Packaging equipment, and consumables. Some AMHS. Gas, and chemical handling equipment. Some resist makers.

Clean room material markers, few makers of vacuum grade plastics, FOUP, film, and other carriers.

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