The Inventor of the First MEMS Device Dies at 83 Posted by pross356 on Wednesday June 24, 2020 @04:49PM from the spectrum.ieee.org dept. https://spectrum.ieee.org/the-institute/ieee-member-news/harvey-c-nathanson-inventor-of-the-first-mems-device-dies-at-83 ( no comments | on HN )
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