Neural networks suffer from provability issues, you don't want to make a multi million dollar mask set only to find out your ConvNets were hallucinating. There are more standard computational lithography techniques such as OPC, RET and inverse lithography.

With that being said, there's been some work done:

https://ieeexplore.ieee.org/document/5726499/

https://www.spiedigitallibrary.org/conference-proceedings-of...

http://iopscience.iop.org/article/10.1088/2040-8978/12/4/045...

https://www.google.com/url?sa=t&source=web&rct=j&url=http://...