"we get a tax credit if we build a lot of wind farms. That's the only reason to build them. They don't make sense without the tax credit." --Warren Buffet
This illustrates the reality of every "renewable" facility I've heard of to date. If the business case has changed just now, that's great and I look forward to the future. But most of what I've seen has been very silly industry propaganda.
https://www.deutschebank.nl/nl/docs/Solar_-_2014_Outlook_Let...
And to answer your question about non-tax-farm, I don't know. If the government gives a subsidy, why wouldn't you take it even if you're profitable without it?
Subsidies alone don't prove that the solar farms are not profitable.
According to everything I can find online the answer is a clear Yes?
Solar panels are getting cheaper and cheaper, and they definitely have a positive ROI now. And there are huge solar farms being built all over the world. I'm pretty sure they did the math before investing millions of dollars.