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A comment on EUV Lithography Finally Ready for Chip Manufacturing. Parent comment
What is not constrained by wavelength is deposition and etching of layers, that could be (in theory at least) as thin as you like down to a monolayer.
With multipatterning you can place such small features, but the layout still is constrained by the wavelength.
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What is not constrained by wavelength is deposition and etching of layers, that could be (in theory at least) as thin as you like down to a monolayer.
With multipatterning you can place such small features, but the layout still is constrained by the wavelength.