Robots help. The "lights-out" fab has been an industry goal for thirty years at least. (Lights-out = no human operators. I.e. you could turn out the lights and nobody would mind.) We've moved a long way in that direction, but we're not going to remove humans in the forseeable future. The reason is something your question, like many discussions about automation, completely overlooks.

Robots break. All the time.

Robots need recovery when they break. They also need preventative maintenance. Even a fully automated fab has an army of technicians in there turning wrenches 24/7. In fact, the more automated the fab, the more people you need turning wrenches. So you can't have a factory that's a toxic swamp inside so long as it's clean on both ends, because there are people in there. You really don't want to ask them to wear SCBA gear all day long either. Nobody likes that. It's hot, it's uncomfortable, and it doesn't work well in tight spaces.