Ask that same question again after we have self-aware machines/software.

Inherent in the negative concept of slavery is the removal or limitation of self-determination. If the components don't have free will, this isn't an imposition.

However, in the larger context, there are very much thinking, feeling entities that are negatively impacted by the use of this terminology.

In contrast, it costs next to nothing to update the terminology to use similar terms that don't cause psychological harm to a significant portion of the populace.